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Gas-phase silicon micromachining with xenon difluoride

Author(s):
Chang,F.I. ( Univ.of California/Los Angeles )
Yeh,R.
Lin,G.
Chu,P.B.
Hoffman,E.J.
Kruglick,E.J.J.
Pister,K.S.J.
Hecht,M.H.
3 more
Publication title:
Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2641
Pub. Year:
1995
Page(from):
117
Page(to):
128
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420077 [0819420077]
Language:
English
Call no.:
P63600/2641
Type:
Conference Proceedings

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