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Fabrication of micromirror supported by electroplated nickel posts

Author(s):
Shin,J.-W. ( Seoul National Univ. )
Chung,S.-W.
Kim,Y.-K.
Lee,E.-H.
Choi,B.-G.
Ahn,S.-J.
1 more
Publication title:
Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2641
Pub. date:
1995
Page(from):
88
Page(to):
95
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420077 [0819420077]
Language:
English
Call no.:
P63600/2641
Type:
Conference Proceedings

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