Micromachined three-dimensional tunable Fabry-Perot etalons

Micromachined three-dimensional tunable Fabry-Perot etalons

Author(s):

Lin,L.-Y. ( Univ.of California/Los Angeles )
Shen,J.L.
Lee,S.-S.
Wu,M.C.

Publication title:

Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2641

Pub. Year:

1995

Page(from):

20

Page(to):

27

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819420077 [0819420077]

Language:

English

Call no.:

P63600/2641

Type:

Conference Proceedings

Details

TDL ID:	ZA00017471
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications
Conf. info. (Number):	1995
Conf. info. (Venue):	Austin, TX, USA
Conf. info. (Date):	1995.10.24

Similar Items:

1 Conference Proceedings Micromachined tunable Fabry-Perot filters for wavelength division multiplexing Larson,M.C., Harris,J.S.,Jr. SPIE-The International Society for Optical Engineering	7 Conference Proceedings Tunable Fabry-Perot cavities Winchester,K.J., Spaargaren,S.M.R., Dell,J.M. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Spaceflight-qualified tunable cryogenic infrared Fabry-Perot etalon Dehring, M.T., Lindemann, S., Nardell, C.A., Hays, P.B., Wang, J., Cook, W. SPIE - The International Society of Optical Engineering	8 Conference Proceedings Electromechanical simulation of a large-aperture MOEMS Fabry-Perot tunable filter Kuhn,J.L., Barclay,R.B., Greenhouse,M.A., Mott,D.B., Satyapal,S. SPIE-The International Society for Optical Engineering
3 Conference Proceedings Micromachined tunable Fabry-Perot filters for infrared astronomy Mott, D.B., Barclay, R.B., Bier, A., Chen, T.C., DiCamillo, R., Deming, D., Greenhouse, M.A., Henry, R., Hewagama, T., … SPIE-The International Society for Optical Engineering	9 Conference Proceedings High-precision thermal expansion measurements using small Fabry-Perot etalons M. J. Davis, J. S. Hayden, D. L. Farber SPIE - The International Society of Optical Engineering
4 Conference Proceedings Dynamic and spectral responses of a micromachined Fabry-Perot interferometer-based spectrometer Liu,K.-K., Lee,S.-P., Lin,R.-J., Hsu,L. SPIE - The International Society for Optical Engineering	10 Conference Proceedings Tunable Fabry-Perot etalons for the 120-to 150-nm wavelength range Wulser,J.-P., Rosenberg,W.A., Bruner,M.E. SPIE-The International Society for Optical Engineering
5 Conference Proceedings Integration of DFB lasers with surface-micromachined wavelength-monitoring devices for WDM systems Lee,S.-S., Lin,L.-Y., Wu,M.C. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Electronically tunable Fabry-Perot interferometers with double liquid crystal layers Lin, K.-C., Lee,K.-Y., Lai, C.-C., Chang, C.-Y., Wong, S.-H. SPIE-The International Society for Optical Engineering
6 Conference Proceedings Realization of FDDI optical bypass switches using surface micromachining technology Lee,S.-S., Lin,L.-Y., Wu,M.C. SPIE-The International Society for Optical Engineering	12 Conference Proceedings Tunable Fabry-Perot filter for imaging spectroscopy in the infrared Schwarze, C.R., Rentz, J.H., Carlson, D.L., Vaillancourt, R.M., Genetti, G.G., Engel, J.R. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12