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Silicon nitride and oxide deposited by direct photolysis on sulfur treated GaAs and InP:Application to III-V Passivation

Author(s):
Proust,N.
Guillot,E.
Petitjean,M.
Beguet,M.
Chapeaublanc,J.F.
Perrin,J.
1 more
Publication title:
Passivation of metals and semiconductors : proceedings of the Seventh International Symposium on Passivity, Passivation of Metals and Semiconductors, Technical University of Clausthal, Germany, August 21-26, 1994
Title of ser.:
Materials science forum
Ser. no.:
185-188
Pub. Year:
1995
Page(from):
185
Page(to):
190
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878496921 [0878496920]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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