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Passivation of GaAs with sulphur surface treatment and UVCVD silicon nitride cap layer

Author(s):
Publication title:
Passivation of metals and semiconductors : proceedings of the Seventh International Symposium on Passivity, Passivation of Metals and Semiconductors, Technical University of Clausthal, Germany, August 21-26, 1994
Title of ser.:
Materials science forum
Ser. no.:
185-188
Pub. Year:
1995
Page(from):
179
Page(to):
184
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878496921 [0878496920]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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