Real-time monitoring and control during MBE growth of GaAs/AIGaAs Bragg reflectors using multiwave ellipsometry

Real-time monitoring and control during MBE growth of GaAs/AIGaAs Bragg reflectors using multiwave ellipsometry

Author(s):

Wagner,T. ( LOT-Oriel GmbH(FRG) )

Johs,B.D. ( J.A.Woollam Co.(USA) )

Herzinger,C.M. ( J.A.Woollam Co.(USA) )

He,P. ( J.A.Woollam Co.(USA) )

Pittal,S. ( J.A.Woollam Co.(USA) )

Woollam,J.A. ( J.A.Woollam Co.(USA) )

1 more

Publication title:

Polarimetry and ellipsometry : 20-23 May, 1996, Kazimierz Dolny, Poland

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3094

Pub. Year:

1997

Page(from):

301

Page(to):

307

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819425096 [0819425095]

Language:

English

Call no.:

P63600/3094

Type:

Conference Proceedings

Details

TDL ID:	ZA00017410
Series ID:	PA00000029
Conf. info. (Name):	Polarimetry and Ellipsometry
Conf. info. (Number):	1996
Conf. info. (Venue):	Kazimierz Dolny, Poland
Conf. info. (Date):	1996.05.20-1996.05.23

Similar Items:

1 Conference Proceedings Recent developments in spectroscopic ellipsometry for in-situ applications Johs,B.D., Hale,J., Ianno,N.J., Herzinger,C.M., Tiwald,T.E., Woollam,J.A. SPIE-The International Society for Optical Engineering	7 Conference Proceedings Spectroscopic Ellipsometry in Optical Coatings Manufacturing J.N. Hilfiker, J.S. Hale, B.D. Johs, T.E. Tiwald, R.A. Synowicki, C.L. Bungay, J.A. Woollam Society of Vacuum Coaters
2 Conference Proceedings Application of generalized ellipsometry to complex optical systems Schubert,M., Rheinlander,B., Woollam,J.A., Johs,B.D., Herzinger,C.M. SPIE-The International Society for Optical Engineering	8 Conference Proceedings In Situ Multi-Wavelength Ellipsometric Control of Thickness and Composition for Bragg Reflector Structures Herzinger, Craig, Johs, Blaine, Chow, Peter, Reich, Dave, Carpenter, Greg, Croswell, Dan, Hove, Jim Van MRS - Materials Research Society
3 Conference Proceedings Real-Time Monitoring of Semiconductor Growth by Spectroscopic Ellipsometry Johs, B., Hale, J., Herzinger, C., Doctor, D., Elliott, K., Olson, G., Chow, D., Roth, J., Ferguson, I., Pelczynski, M., … MRS - Materials Research Society	9 Conference Proceedings Ellipsometric Monitoring of Defects Induced by Electron Cyclotron Resonance Etching of GaAs Snyder, P. G., Ianno, N. J., Wigert, B., Pittal, S., Johs, B., Woollam, J. A. MRS - Materials Research Society
4 Conference Proceedings Recent Developments in Spectroscopic Ellipsometry for Materials and Process Control J.N. Hilfiker, B. Johs, J. Hale, C.M. Herzinger, T.E. Tiwald, C.L. Bungay, R.A. Synowicki, G.K. Pribil, J.A. Woollam Society of Vacuum Coaters	10 Conference Proceedings IN-SITU SPECTROSCOPIC ELLIPSOMETRY APPLIED TO ZnSe AND ZnCdSe GROWTH PROCESS IN ORGANOMETALLIC VAPOR PHASE EPITAXY Iacoponi, J., Bhat, I.B., Johs, B., Woollam, J.A. Materials Research Society
5 Conference Proceedings REAL-TIME ANALYSIS OF IN-SITU SPECTROSCOPIC ELLIPSOMETRIC DATA DURING MBE GROWTH OF III-V SEMICONDUCTORS Johs, B., Edwards, J. L., Shiralagi, K. T., Droopad, R., Choi, K. Y., Maracas, G. N., Meyer, D., Cooney, G. T., Woollam, … Materials Research Society	11 Conference Proceedings Optical Monitoring of Thin Films Using Spectroscopic Ellipsometry D.E. Morton, B. Johs, J. Hale Society of Vacuum Coaters
6 Conference Proceedings IN SITU SPECTROSCOPIC ELLIPSOMETRY FOR REAL TIME SEMICONDUCTOR GROWTH MONITOR Johs Blaine, Meyer, Duane, Cooney, Gerald, Yao, Huade, Snyder, Paul G., Woollam, John A., Edwards, John, Maracas, George Materials Research Society	12 Conference Proceedings In-situ monitor and control using fast spectroscopic ellipsometry Woollam,J.A., Gao,X., Heckens,S., Hilfiker,J.N. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12