Study of wetting properties of Ti/TiN liners deposited by ion metal plasma PVD for low-temperature sub-0.25-ヲフm Al fill technology
- Author(s):
Hui,S. ( Applied Materials,Inc. ) Ngan,K. ( Applied Materials,Inc. ) Narasimhan,M.K. ( Applied Materials,Inc. ) Hogan,B. ( Applied Materials,Inc. ) Yao,G. ( Applied Materials,Inc. ) Ramaswami,S. ( Applied Materials,Inc. ) - Publication title:
- Multilevel Interconnect Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3214
- Pub. Year:
- 1997
- Page(from):
- 79
- Page(to):
- 83
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819425461 [081942546X]
- Language:
- English
- Call no.:
- P63600/3214
- Type:
- Conference Proceedings
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