BuIk-micromachined pressure sensor based on epi-poly techniques

BuIk-micromachined pressure sensor based on epi-poly techniques

Author(s):

Gennissen,P.T.J. ( Deift Univ.of Technology (Netherlands) )
Ashruf,C.M.A.. ( Deift Univ.of Technology (Netherlands) )
Kaak,M. ( Hogeschool van Utrecht (Netherlands) )
French,P.J. ( Delft Univ.of Technology (Netherlands) )
Sarro,P.M. ( Delft Univ.of Technology (Netherlands) )

Publication title:

Micromachined Devices and Components III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3224

Pub. Year:

1997

Page(from):

212

Page(to):

219

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819426567 [0819426563]

Language:

English

Call no.:

P63600/3224

Type:

Conference Proceedings

Details

TDL ID:	ZA00017397
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : Micromachined Devices and Components
Conf. info. (Number):	1997 : 3rd
Conf. info. (Venue):	Austin, TX, USA
Conf. info. (Date):	1997.09.29

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