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Electrostatic comb drive for vertical actuation

Author(s):
Lee,A.P. ( Lawrence Livermore National Lab. )
McConaghy,C.F. ( Lawrence Livermore National Lab. )
Krulevitch,P.A. ( Lawrence Livermore National Lab. )
Campbell,E.W. ( Lawrence Livermore National Lab. )
Sommargren,G.E. ( Lawrence Livermore National Lab. )
Trevino,J.C. ( Lawrence Livermore National Lab. )
1 more
Publication title:
Micromachined Devices and Components III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3224
Pub. Year:
1997
Page(from):
109
Page(to):
119
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426567 [0819426563]
Language:
English
Call no.:
P63600/3224
Type:
Conference Proceedings

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