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Routes to failure in rotating MEMS devices experiencing sliding friction

Author(s):
Miller,S.L. ( Sandia National Labs. )
LaVigne,C. ( Sandia National Labs. )
Rodgers,M.S. ( Sandia National Labs. )
Sniegowski,J.J. ( Sandia National Labs. )
Waters,J.P. ( Sandia National Labs. )
McWhorter,P.J. ( Sandia National Labs. )
1 more
Publication title:
Micromachined Devices and Components III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3224
Pub. date:
1997
Page(from):
24
Page(to):
30
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426567 [0819426563]
Language:
English
Call no.:
P63600/3224
Type:
Conference Proceedings

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