Blank Cover Image

Automatic test equipment for the micromirror array

Author(s):
Kim,H. ( Chung-Ang Univ.(Korea) )
Cho,K. ( Chung-Ang Univ.(Korea) )
Kim,Y.-K. ( Seoul National Univ.(Korea) )
Shin,J.-W. ( Seoul National Univ.(Korea) )
Shin,H.-J. ( Samsung Electronics Co.,Ltd. (Korea) )
Moon,J.-H. ( Samsung Electronics Co.,Ltd. (Korea) )
1 more
Publication title:
Miniaturized Systems with Micro-Optics and Micromechanics III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3276
Pub. Year:
1998
Page(from):
103
Page(to):
110
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427151 [0819427152]
Language:
English
Call no.:
P63600/3276
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Photochemical selective surface modification using micromirror array for biochip fabrication

Lee,K.-N., Shin,D.-S., Chung,W.-J., Lee,Y.-S., Kim,Y.-K.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Advanced module-based approach to effective CD prediction of sub-100nm patterns

Shin, J., Kim, I., Hwang, C., Park, D.-W., Woo, S.-G., Cho, H.-K., Han, W.-S., Moon, J.-T.

SPIE - The International Society of Optical Engineering
2 Conference Proceedings Fabrication of micromirror supported by electroplated nickel posts

Shin,J.-W., Chung,S.-W., Kim,Y.-K., Lee,E.-H., Choi,B.-G., Ahn,S.-J.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Fabrication and deflection measurement of micromirrors supported by an S-shape girder

Kim,H., Kim,J.-K., Kim,Y.-K., Shin,H.-J.

SPIE - The International Society for Optical Engineering
3 Conference Proceedings Tests on micromirror arrays for adaptive optics

Liesener, J., Hupfer, W. J., Gehner, A., Wallace, K.

SPIE - The International Society of Optical Engineering
9 Conference Proceedings Test system for micromirror arrays

Durr,P., Tanneberger,T., Wolter,A., Kluge,W., Doleschal,W., Lakner,H.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Effect of line-edge roughness (LER) and line-width roughness (LWR) on sub-100-nm device performance

Lee, J.-Y., Shin, J., Kim, H.-W., Woo, S.-G., Cho, H.-K., Han, W.-S., Moon, J.-T.

SPIE - The International Society of Optical Engineering
10 Conference Proceedings Design and testing of polysilicon surface-micromachined piston micromirror arrays

Cowan,W.D., Bright,V.M., Lee,M.K., Comtois,J.H., Michalicek,M.A.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Fabrication of electromagnetic micromirror array

Jang,Y.-H., Kim,Y.-K.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Single crystalline silicon micromirror array for maskless photolithography in protein synthesis systems

Jang, Y.-H., Lee, K.-N., Shin, D.-S., Lee, Y.-S., Kim, Y.-K.

SPIE - The International Society of Optical Engineering
6 Conference Proceedings Design and simulation of a micromirror array for a projection TV

Choi,B., Lee,J., Jung,K., Shin,H.

SPIE - The International Society for Optical Engineering
12 Conference Proceedings Impact of Plasma Nitridation Method on VFB Shift and the Reliability of CMOSFETs

D.-C. Kim, M.-H. Cho, J.-H. Heo, B.-Y. Koo, C.-S. Kim, Y.-J. Noh, J.-H. Kim, K.-B. Clung, Y. Shin, D.-W. Moon, U.-I. …

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12