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Miniaturized fiber optical switches with nonmoving polymeric mirrors for tele- and data-communication networks fabricated using the LIGA technology

Author(s):
  • Neumeier,M. ( Institut fur Microtechnik Mainz GmbH (FRG) )
  • Ehrfeld,W. ( Institut fur Microtechnik Mainz GmbH (FRG) )
  • Jager,J. ( Institut fur Microtechnik Mainz GmbH (FRG) )
  • Picard,A. ( Institut fur Microtechnik Mainz GmbH (FRG) )
  • Schulze,J. ( Institut fur Microtechnik Mainz GmbH (FRG) )
Publication title:
Miniaturized Systems with Micro-Optics and Micromechanics III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3276
Pub. Year:
1998
Page(from):
37
Page(to):
47
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427151 [0819427152]
Language:
English
Call no.:
P63600/3276
Type:
Conference Proceedings

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