Surface modification by plasma immersion ion processing

Surface modification by plasma immersion ion processing

Author(s):

Walter,K.C. ( Los Alamos National Lab. (USA) )

Lee,D.H. ( Los Alamos National Lab. (USA) )

He,X.M. ( Los Alamos National Lab. (USA) )

Baker,N.P. ( Los Alamos National Lab. (USA) )

Nastasi,M. ( Los Alamos National Lab. (USA) )

Munson,C.P. ( Los Alamos National Lab. (USA) )

Scarborough,W.K. ( Los Alamos National Lab. (USA) )

Taszewski,M. ( Los Alamos National Lab. (USA) )

Wood,B.P. ( Los Alamos National Lab. (USA) )

4 more

Publication title:

Materials Modification by Ion Irradiation

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3413

Pub. Year:

1998

Page(from):

156

Page(to):

164

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819428677 [0819428671]

Language:

English

Call no.:

P63600/3413

Type:

Conference Proceedings

Details

TDL ID:	ZA00017379
Series ID:	PA00000029
Conf. info. (Name):	Materials Modification by Ion Irradiation
Conf. info. (Number):	1998
Conf. info. (Venue):	Quebec, Canada
Conf. info. (Date):	1998.07.15-1998.07.16

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