Characterization techniques for surface-micromachined devices

Characterization techniques for surface-micromachined devices

Author(s):

Eaton,W.P. ( Sandia National Labs. )
Smith,N.F. ( Sandia National Labs. )
Irwin,L.W. ( Sandia National Labs. )
Tanner,D.M. ( Sandia National Labs. )

Publication title:

Micromachined Devices and Components IV

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3514

Pub. Year:

1998

Page(from):

431

Page(to):

438

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819429735 [0819429732]

Language:

English

Call no.:

P63600/3514

Type:

Conference Proceedings

Details

TDL ID:	ZA00017376
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : Micromachined Devices and Components
Conf. info. (Number):	1998 : 4th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	1998.09.21-1998.09.22

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