Blank Cover Image

CMOS resonant sensors (Invited Paper)

Author(s):
  • Brand,O. ( Swiss Federal Institute of Technology )
  • Hornung,M. ( Swiss Federal Institute of Technology )
  • Lange,D. ( Swiss Federal Institute of Technology )
  • Baltes,H. ( Swiss Federal Institute of Technology )
Publication title:
Micromachined Devices and Components IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3514
Pub. Year:
1998
Page(from):
238
Page(to):
250
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429735 [0819429732]
Language:
English
Call no.:
P63600/3514
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings CMOS chemical microsensors based on resonant cantilever beams

Lange.D, Koll,A., Brand,O., Baltes,H.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Defect Related Problems with the On-Chip Integration of Sensors into CMOS Devices

Mueller, T., Kissinger, G., Benkitsch, A.C., Brand, O., Baltes, H.

Electrochemical Society
2 Conference Proceedings IC microtransducers: new components with old materials? (Invited Paper)

Baltes,H., Lange,D., Koll,A.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Discrimination of volatile organic compounds using CMOS capacitive chemical microsensors with thickness-adjusted polymer coating

Koll,A., Kummer,A., Brand,O., Baltes,H.

SPIE - The International Society for Optical Engineering
3 Conference Proceedings Long-term stability of membrane transducers for proximity sensing

Hornung,M., Brand,O., Paul,O., Baltes,H.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings On-chip circuitry for a CMOS parallel scanning AFM

Hagleitner,C., Lange,D., Akiyama,T., Tonin,A., Vogt,R., Baltes,H.

SPIE - The International Society for Optical Engineering
4 Conference Proceedings CMOS-based chemical microsensors:components of a micro nose system

Hierlemann,A., Koll,A., Lange,D., Hagleitner,C., Kerness,N., Brand,O., Baltes,H.

SPIE - The International Society for Optical Engineering
10 Conference Proceedings Flip-chip packaged CMOS chemical microsystem for detection of volatile organic compounds

Koll,A., Kawahito,S., Mayer,F., Hagleitner,C., Scheiwller,D., Brand,O., Baltes,H.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings CMOS integrated microsystems and nanosystems

Baltes,H., Brand,O.

SPIE - The International Society for Optical Engineering
11 Conference Proceedings Fluxless microjoining by Au-In-Ni isothermal solidification

Waelti, M., Schneeberger, N., Brand, O., Baltes, H.

MRS-Materials Research Society
6 Conference Proceedings CMOS MEMS technology and CAD:the case of thermal microtransducers

Baltes,H., Brand,O., Paul,O.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings From research to product: the CMOS MEMS case

Baltes,H.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12