Blank Cover Image

MEMS actuators based on smart film materials (Invited Paper)

Author(s):
Quandt,E. ( Forschungszentrum Karlsruhe GmbH (Germany) )  
Publication title:
Micromachined Devices and Components IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3514
Pub. Year:
1998
Page(from):
136
Page(to):
146
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429735 [0819429732]
Language:
English
Call no.:
P63600/3514
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Smart materials for actuation in microrobots (Invited Paper)

Kortschack, A., Fatikow, S.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Giant Magnetostrictive Multilayer Thin-Film Transducers

Quandt, E., Ludwig, A.

MRS - Materials Research Society
2 Conference Proceedings MEMS materials characterization necessary for smart design and fabrication (Invited Paper)

Sato, K.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Control of MEMS-based actuator array for micro smart systems

Chapuis, Y.-A., Fukuta, Y., Zhou, L., Mita, Y., Fujita, H.

SPIE - The International Society of Optical Engineering
3 Conference Proceedings MEMS- and NEMS-based smart devices and systems (Invited Paper)

Varadan, V.K.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Fiber optic nerve systems for smart materials and smart structures (Invited Paper)

Hotate, K.

SPIE - The International Society of Optical Engineering
4 Conference Proceedings Polyimide MEMS actuators for medical imaging (Invited Paper)

Zara, J.M., Mills, P., Patterson, P.

SPIE - The International Society of Optical Engineering
10 Conference Proceedings Smart Materials Based on Shape Memory Alloys: Examples from Europe (Invited paper)

Gotthardt, R., Scherrer, P., Stalmans, R.

Trans Tech Publications
5 Conference Proceedings SMA: smart materials for medical applications (Invited Paper)

Duerig, T., Stoeckel, D., Johnson, D.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Review of current research activities in optimization of smart structures and actuators (Invited Paper)

Frecker, M.I.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Researches of Smart Materials in Japan (Invited paper)

Furuya, Y., Tani, J.

Trans Tech Publications
12 Conference Proceedings Excimer-laser-based multifunctional patterning systems for optoelectronics, MEMS, materials processing, and biotechnology (Invited Paper)

Jain, K.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12