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Micro-electro-optical devices in a five-level polysilicon surface-micromachining technology (Invited Paper)

Author(s):
Smith,J.H. ( Sandia National Labs. )
Rodgers,M.S. ( Sandia National Labs. )
Sniegowski,S.L. ( Sandia National Labs. )
Miller,S.L. ( Sandia National Labs. )
Hetherington,D.L. ( Sandia National Labs. )
McWhorter,P.J. ( Sandia National Labs. )
Warren,M.E. ( Sandia National Labs. )
2 more
Publication title:
Micromachined Devices and Components IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3514
Pub. Year:
1998
Page(from):
42
Page(to):
47
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429735 [0819429732]
Language:
English
Call no.:
P63600/3514
Type:
Conference Proceedings

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