Microassembly technologies for MEMS

Author(s):

Cohn,M.B. ( Univ.of California/Berkeley )

Bohringer,K.F. ( Univ.of California/Berkeley and Univ.of Washington )

Noworolski,J.M. ( Univ.of California/Berkeley )

Singh,A. ( Univ.of California/Berkeley )

Keller,C.G. ( MEMS Precision Instruments )

Goldberg,K.Y. ( Univ.of California/Berkeley )

Howe,R.T. ( Univ.of California/Berkeley )

2 more

Publication title:

Micromachined Devices and Components IV

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3514

Pub. Year:

1998

Page(from):

2

Page(to):

16

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819429735 [0819429732]

Language:

English

Call no.:

P63600/3514

Type:

Conference Proceedings