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Dry release process of anhydrous HF gas-phase etching for the fabrication of a vibrating microgyroscope

Author(s):
Jang,W.I. ( Electronics and Telecommunications Research Institute )
Choi,C.A.
Hong,Y.S.
Jun,C.H.
Kim,Y.T.
Lee,J.H.
1 more
Publication title:
Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3892
Pub. date:
1999
Page(from):
332
Page(to):
339
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434937 [0819434930]
Language:
English
Call no.:
P63600/3892
Type:
Conference Proceedings

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