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Two-dimensional microscanner actuated by PZT thin film

Author(s):
Publication title:
Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3892
Pub. Year:
1999
Page(from):
133
Page(to):
140
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434937 [0819434930]
Language:
English
Call no.:
P63600/3892
Type:
Conference Proceedings

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