Hybrid laser processing of micromachining for hard materials
- Author(s):
- Sugioka,K. ( RIKEN-The Institute of Physical and Chemical Research )
- Zhang,J.
- Midorikawa,K.
- Publication title:
- Computer-controlled microshaping : 16-18 June 1999, Munich, Germany
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3822
- Pub. Year:
- 1999
- Page(from):
- 6
- Page(to):
- 17
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819433084 [081943308X]
- Language:
- English
- Call no.:
- P63600/3822
- Type:
- Conference Proceedings
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