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Influence of deposition parameters on rf-sputtered DLC thin films

Author(s):
Publication title:
Advances in Optical Interference Coatings : 25-27 May 1999, Berlin, Germany
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3738
Pub. Year:
1999
Page(from):
34
Page(to):
39
Pub. info.:
Bellingham, WA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819432124 [0819432121]
Language:
English
Call no.:
P63600/3738
Type:
Conference Proceedings

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