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Polysilicon surface micromachined optical rotating sensor

Author(s):
Publication title:
Smart structures and materials 1999 : smart electronics and MEMS : 1-3 March, 1999, Newport Beach, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3673
Pub. Year:
1999
Page(from):
202
Page(to):
209
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819431479 [0819431478]
Language:
English
Call no.:
P63600/3673
Type:
Conference Proceedings

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