CMOS integrated microsystems and nanosystems
- Author(s):
- Publication title:
- Smart structures and materials 1999 : smart electronics and MEMS : 1-3 March, 1999, Newport Beach, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3673
- Pub. Year:
- 1999
- Page(from):
- 2
- Page(to):
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819431479 [0819431478]
- Language:
- English
- Call no.:
- P63600/3673
- Type:
- Conference Proceedings
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