Fabrication of Planar Inductor on Low Resistivity Silicon Substrates for RF Applications
- Author(s):
- Publication title:
- Proceedings of the Tenth International Workshop on the Physics of Semiconductor Devices (December 14-18, 1999)
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3975
- Pub. Year:
- 2000
- Vol.:
- Part1
- Page(from):
- 452
- Page(to):
- 455
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819436016 [0819436011]
- Language:
- English
- Call no.:
- P63600/3975
- Type:
- Conference Proceedings
Similar Items:
Narosa Publishing House |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Temperature Dependence of Electrical Properities of Ultrathin Nitrided Oxide Grown on Strained-SiGe by Rapid Thermal Oxidation
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
Structural and Electrical Characterizations of Oxynitride Films on Solid Phase Epitaxially Grown Silicon Carbide
Materials Research Society |
SPIE-The International Society for Optical Engineering, Narosa |
Narosa Publishing House |
Electrochemical Society |
Narosa Publishing House |
SPIE-The International Society for Optical Engineering |