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Dislocation-Induced Surface Strain on (001) Silicon-on-Insulator

Author(s):
Publication title:
Epitaxial growth - principles and applications : symposium held April 5-8, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
570
Pub. Year:
1999
Page(from):
235
Pub. info.:
Warrendale, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994775 [1558994777]
Language:
English
Call no.:
M23500/570
Type:
Conference Proceedings

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