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Fabrication and Characterization of PZT Thin Film on Bulk Micromachined Si Motion Detectors

Author(s):
Publication title:
Ferroelectric thin films VII : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
541
Pub. Year:
1999
Page(from):
629
Pub. info.:
Warrendale, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994478 [1558994475]
Language:
English
Call no.:
M23500/541
Type:
Conference Proceedings

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