Improved Properties of TaOx Films Doped With Al and N

Improved Properties of TaOx Films Doped With Al and N

Author(s):

Publication title:

Ferroelectric thin films VII : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

541

Pub. Year:

1999

Page(from):

561

Pub. info.:

Warrendale, PA: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994478 [1558994475]

Language:

English

Call no.:

M23500/541

Type:

Conference Proceedings

Details

TDL ID:	ZA00017065
Series ID:	PA00000011
Conf. info. (Name):	Symposium on ferroelectric thin films
Conf. info. (Number):	7th
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1998.11.30-1998.12.03

Similar Items:

1 Conference Proceedings High Dielectric Constant Hf-Ti-Sn-O Off-Axis Cosputtered Films Schneemeyer, L. F., Dover, R. B. van, Fleming, R. M. MRS - Materials Research Society	7 Conference Proceedings SINGLE Cu-O LAYER BISMUTH STRONTIUM CUPRATES: CRYSTAL GROWTH AND ELECTRONIC PROPERTIES Schneemeyer, L.F., Waszczak, J.V., Fleming, R.M., Martin, S., Fiory, A.T., Sunshine, S.A. Materials Research Society
2 Conference Proceedings SUPERLATTICE MODULATION IN Nd2CuO4 AND THE ELECTRON-DOPED SYSTEMS Nd2-xCuO4-xFx James, A.C.W.P., Murphy, D.W., Chen, C.H., Werder, D.J., Chiang, J., Zahurak, S.M., Fleming, R.M., Batlogg, B., … Materials Research Society	8 Conference Proceedings CRITICAL CURRENT ENHANCEMENT IN SINGLE-CRYSTAL Ba2Cu3O7 Van Dover, R.B., Gyorgy, E.M., Schneemeyer, L.F., White, A.E., Glarum, S., Felder, R.J., Waszczak, J.V. Materials Research Society
3 Conference Proceedings Effects of Oxygen Stoichiometry on Structure and Properties in Ba2YCu3Ox Murphy, D. W., Sunshine, S. A., Gallagher, P. K., O'Bryan, H. M., Cava, R. J., Batlogg, B., Dover, R. B. van, … American Chemical Society	9 Conference Proceedings Material and Electrical Characterization of Carbon-Doped Ta2O5 Films for Embedded DRAM Applications Chu, Karen, Cho, Byeong-Ok, Chang, Jane P., Steigerwald, Mike L., Fleming, Robert M., Opila, Robert L., Lang, Dave V., … Materials Research Society
4 Conference Proceedings ORTHORHOMBIC SPLITTING AND CHEMICAL ETCHING OF Ba2YCu3O7-δ CRYSTAL SURFACES Werder, D.J., Chen, C.H., Gurvitch, M., Miller, B., Schneemeyer, L.F., Waszczak, J.V. Materials Research Society	10 Conference Proceedings STRUCTURAL AND PHYSICAL PROPERTIES IN THE Bi-Sr-Cu-O SYTSEM Sunshine, S.A., Schneemeyer, L.F., Fleming, R.M., Fiory, A.T., Martin, S., Glarum, S.H. Materials Research Society
5 Conference Proceedings EPITAXIAL FERROELECTRIC HETEROSTRUCTURES OF ISOTROPIC METALLIC OXIDE (SrRuO3) AND Pb(Zr0.52Ti0.48)O3 Eom, C. B., Dover, R. B. Van, Phillips, Julia M., Fleming, R. M., Cava, R. J., Marshall, J. H., Werder, D. J., Chen, C. … MRS - Materials Research Society	11 Conference Proceedings The Compositional Spread Approach to High-Dielectric Constant Materials and Materials for Integrated Optics Schneemeyer, L.F., van Dover, R.B., Madsen, C.K., Claypool, C.L. American Chemical Society
6 Conference Proceedings Epitaxial single crystalline ferrite films for high frequency applications Suzuki, Y., Van Dover, R.B., Korenivski, V., Werder, D., Chen, C.H., Felder, R.J., Phillips, Julia M. Materials Research Society	12 Conference Proceedings Charge Transport in Anodized Ta205, HfO2 and ZrO2 Thin Films Jones, C.D.W., Fleming, R.M, Lang, D.V., Steigerwald, M.L., Murphy, D.W., Vyas, B., Alers, G.B., Wong, Y.-H., van Dover, … Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12