Effect of Annealing Treatment on PZT Thin Film Properties Using Oxygen 18 Depth Profiling Technique

Effect of Annealing Treatment on PZT Thin Film Properties Using Oxygen 18 Depth Profiling Technique

Author(s):

Publication title:

Ferroelectric thin films VII : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

541

Pub. Year:

1999

Page(from):

393

Pub. info.:

Warrendale, PA: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994478 [1558994475]

Language:

English

Call no.:

M23500/541

Type:

Conference Proceedings

Details

TDL ID:	ZA00017065
Series ID:	PA00000011
Conf. info. (Name):	Symposium on ferroelectric thin films
Conf. info. (Number):	7th
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1998.11.30-1998.12.03

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