Interconnect-Related Degradation of PZT Capacitor for FeRAM
- Author(s):
- Publication title:
- Ferroelectric thin films VII : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 541
- Pub. Year:
- 1999
- Page(from):
- 83
- Pub. info.:
- Warrendale, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994478 [1558994475]
- Language:
- English
- Call no.:
- M23500/541
- Type:
- Conference Proceedings
Similar Items:
Materials Research Society |
MRS - Materials Research Society |
2
Conference Proceedings
High Temperature Plasma Etching of PZT Capacitor Stacks for High Density FERAMs
Materials Research Society |
8
Conference Proceedings
Material design of negative-tone polyphenol resist for EUV and EB lithography
SPIE - The International Society of Optical Engineering |
3
Conference Proceedings
Effect of Bottom Electrode System on Ferroelectric Properties of Sputter Deposited PZT Capacitors
MRS - Materials Research Society |
Society of Plastics Engineers, Inc. (SPE) |
Materials Research Society |
10
Conference Proceedings
Effect of Surface Morphology of NiCr-Bottom Electrode on Preparation of Ferroelectric PZT Thin Film Capacitor
MRS - Materials Research Society |
Materials Research Society |
Materials Research Society |
6
Conference Proceedings
THE INFLUENCE OF DOPANTS ON THE LEAKAGE CURRENT IN PZT THIN-FILM FERROELECTRIC CAPACITORS
Kluwer Academic Publishers |
12
Conference Proceedings
Ir Thin Films for PZT Capacitors Prepared by MOCVD Using a New Ir Precursor
Materials Research Society |