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Chemical Vapor Deposition Technology of (Ba,Sr)TiO3 Thin Films for Gbit-Scale Dynamic Random Access Memories

Author(s):
Horikawa, T.
Tarutani, M.
Kawahara, T.
Yamamuka, M.
Hirano, N.
Sato, T.
Matsuno, S.
Shibano, T.
Uchikawa, F.
Ono, K.
Oomori, T.
6 more
Publication title:
Ferroelectric thin films VII : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
541
Pub. Year:
1999
Page(from):
3
Pub. info.:
Warrendale, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994478 [1558994475]
Language:
English
Call no.:
M23500/541
Type:
Conference Proceedings

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