Blank Cover Image

Effect of Oxygen on the Formation of Dryetching Damage Introduced Into Si-Substrate

Author(s):
Publication title:
Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
510
Pub. date:
1998
Page(from):
513
Pub. info.:
Warrendale, Pa: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994164 [1558994165]
Language:
English
Call no.:
M23500/510
Type:
Conference Proceedings

Similar Items:

Hamada, K., Hamajima, T., Kitano, T., Ohnishi, H., Yoshino, A.

Electrochemical Society

H. Fujiwara, M. Konishi, T. Ohnishi, T. Nakamura, K. Hamada

Trans Tech Publications

Yokogawa, Y., Nishizawa, K., Nagata, F., Kameyama, T.

MRS-Materials Research Society

Amano, H., Honshio, A., Kitano, T., Miyake, Y., lida, K., Kawashima, T., Imura, M., Balakrishnan, K., Iwaya, M., …

Electrochemical Society

Ho, K. T., Lien, C-D., Nicolet,M-A., Scott, D. M.

North-Holland

Liu, Z., Kawashima, Y., Komatsu, A., Hamada, T., Kawano, H., Shiotani, K.

MRS - Materials Research Society

Tezuka, Y., Kitano, N., Nakano, N.

Electrochemical Society

Herbots, N., Appleton, B.R., Pennycook, S.J., Noggle, T.S., Zuhr, R.A.

Materials Research Society

H. Sako, T. Yamashita, K. Tamura, M. Sasaki, M. Nagaya

Trans Tech Publications

Che,Y.K., Konde,H., Kubota,T., Nakashima,H., Kawano,T., Uedono,A., Kurihara,T., Tanigawa,S.

Trans Tech Publications

Tabata, H., Yanagita, T., Hamada, M., Kawai, T.

MRS - Materials Research Society

Sucoka, K., Yonemura, M., Akatsuka, M., Katahama, H., Ono, T., Asayama, E.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12