Blank Cover Image

Comparison of Oxygen and Hydrogen Gettering at High-Temperature Postimplantation Annealing of Hydrogen- and Helium-Implanted Czochralski Silicon

Author(s):
Publication title:
Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
510
Pub. date:
1998
Page(from):
425
Pub. info.:
Warrendale, Pa: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994164 [1558994165]
Language:
English
Call no.:
M23500/510
Type:
Conference Proceedings

Similar Items:

Ulyashin, A. G., Bumay, Yu. A., Fahrner, W. R., Ivanov, A. I., Job, R., Palmetshofer, L.

MRS - Materials Research Society

Simoen, E., Claeys, C., Job, R., Ulyashin, A.G., Fahrner, W.R., Tonelli, G., Degryse, O., Clauws, P.

Electrochemical Society

Job, R., Fahrner, W. R., Kazuchits, N. M., Ulyashin, A. G.

MRS - Materials Research Society

Simoen, E., Claeys, C., Job, R., Ulyashin, A.G., Fahrner, W.R., Tonelli, G., Degryse, O., Clauws, P.

Electrochemical Society

Job, R., Beaufort, M.-F., Barbot, J.-F., Ulyashin, A.G., Fahrner, W.R.

Materials Research Society

Job, R., Ulyashin, A.G., Fahrner, W.R., Niedernostheide, F.J., Schulze, H.J., Simoen, E., Claeys, C.L., Tonelli, G.

SPIE-The International Society for Optical Engineering

Job, R., Borchert, D., Bumay, Yu. A., Fahrner, W. R., Grabosch, G., Khorunzhii, I. A., Ulyashin, A. G.

MRS - Materials Research Society

Job, R., Dungen, W., Ma, Y., Huang, Y.L., Horstmann, J.T.

Materials Research Society

A. Job, W. Düngen, Y. Ma, W. R. Fahrner, L. O. Keller, J. T. Horstmann, H. Fiedler

Electrochemical Society

Ulyashin, A.G., Job, R., Fahrner, W.R., Mudryi, A.V., Patuk, Al., Shakin, I.A.

Electrochemical Society

Ulyashin, U.G., Petlitskii, A.N., Job, R., Fahrner, W.R.

Electrochemical Society

Ulyashin,A.G., Job,R., Fahrner,W.R., Mudryi,A.V., Patuk,A.I., Shakin,I.A.

Electrochemical Society, SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12