Blank Cover Image

Gettering of Iron and Surface Oxygen by High-Energy Boron Ion Implantation in Silicon

Author(s):
Publication title:
Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
510
Pub. Year:
1998
Page(from):
233
Pub. info.:
Warrendale, Pa: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994164 [1558994165]
Language:
English
Call no.:
M23500/510
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings The Mechanisms of Iron Gettering in Silicon by Boron Ion-Implantation

Benton, J.L., Stolk, P.A., Eaglesham, D.J., Jacobson, D.C., Cheng, J.Y., Poate, J.M., Myers, S.M., Haynes, T.E

Electrochemical Society
7 Conference Proceedings Boron Gettering by Fluorine in Ion-Implanted Silicon

Krasnobaev, L. Ya., Cuomo, J. J., Vyletalina, O. I.

MRS - Materials Research Society
2 Conference Proceedings Oxygen Stabilization of Damage Induced by MeV Ion Implantation

Jain, Amitabh, Mercer, Doug

MRS - Materials Research Society
8 Conference Proceedings Room-Temperature Migration of Ion-Implanted Boron in Silicon

Collart, E. J. H., Weemers, K., Gravesteijn, D. J., Berkum, J. G. M. van, Cowern, N. E. B.

MRS - Materials Research Society
3 Conference Proceedings Influence of oxygen-iron interaction on the external gettering of Fe in p-Si by polycrystalline silicon film

Mishra,K.K., Stinson,M., Lowell,J.K.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Junction Depth Reduction Of Ion Implanted Boron In Silicon Through Fluorine Ion Implantation

Robertson, L. S., Warnes, P. N., Jones, K. S., Earles, S. K., Law, M. E., Downey, D. F., Falk, S., Liu, J.

Materials Research Society
4 Conference Proceedings IMPURITY GETTERING BY IMPLANTED CARBON IN SILICON

Wong, H., Cheung, N.. W., Yu, K. M., Chu, P. K., Liu, J.

Materials Research Society
10 Conference Proceedings DEFECTS PRODUCED BY HIGH ENERGY OXYGEN IONS IMPLANTED IN SILICON

Crob, A., Grob, J. J.,, Perio, A., Thevenin, P., Siffert, P.

Materials Research Society
5 Conference Proceedings PLASMA IMMERSION ION IMPLANTATION FOR IMPURITY GETTERING IN SILICON

Wong, H., Qian, X. Y., Cheung, N. W., Lieverman, M. A., Brown, I. G., Yu, K. M.

Materials Research Society
11 Conference Proceedings The Effect of Oxygen on the Electrical Activation and Diffusion of Ion-Implanted Boron

Larsen, K. Kyllesbech, Stolk, P. A., Privitera, V., Berkum, J. G. M. van, Boer, W. B. de, Mannino, G., Cowern, N. E. B., …

MRS - Materials Research Society
6 Conference Proceedings Transient Enhanced Diffusion for Ultra Low Energy Boron, Phosphorus, and Arsenic Implantation in Silicon

Amitabh, Ning Yu, Mercer, Doug

MRS - Materials Research Society
12 Conference Proceedings Oxide charging induced by electron exposure in ion implant

Stuber,A., Lowell,J.K.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12