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Rapid Thermal Process Requirements for the Annealling of Ultrashallow Junctions

Author(s):
Downey, Daniel F.
Daryanani, Sonu L.
Meloni, Marylou
Brown, Kristen M.
Felch, Susan B.
Lee, Brian S.
Marcus, Steven D.
Gelpey, Jeff
3 more
Publication title:
Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
470
Pub. date:
1997
Page(from):
299
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993747 [1558993746]
Language:
English
Call no.:
M23500/470
Type:
Conference Proceedings

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