Chlorine Precursors for Gate Oxidation Processes
- Author(s):
McGeary, M. J. Martens, P. W. Vermeire, B. Heyns, M. Sprey, H. Lubbers, A. Schaekers, M. - Publication title:
- Environmental, safety, and health issues in IC production : symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 447
- Pub. Year:
- 1997
- Page(from):
- 115
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993518 [1558993517]
- Language:
- English
- Call no.:
- M23500/447
- Type:
- Conference Proceedings
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