An Integrated Approach for the Safe Handling of Hydrides

An Integrated Approach for the Safe Handling of Hydrides

Author(s):

Shealy, J. R.

Publication title:

Environmental, safety, and health issues in IC production : symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

447

Pub. Year:

1997

Page(from):

61

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993518 [1558993517]

Language:

English

Call no.:

M23500/447

Type:

Conference Proceedings

Details

TDL ID:	ZA00017056
Series ID:	PA00000011
Conf. info. (Name):	Symposium on environmental, safety, and health issues in ic production
Conf. info. (Number):	1996
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1996.12.04-1996.12.05

Similar Items:

1 Conference Proceedings Optical and Structural Characterization of Arsenide/Phosphide Interfaces Formed by Flow Modulation Epitaxy Emerson, D. T., Smart, J. A., Whittingham, K. L., Chumbers, E. M., Shealy, J. R. MRS - Materials Research Society	7 Conference Proceedings Is penile electrocautery safe?: ？. Histological and computational temperature assessment in an animal model Hoopes,P.J., Cozzolino,D.J., Cendron,M., Paulsen,K.D., Trembly,B.S., Hartov,A., Ryan,T.P., Bartholomew,L.R. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Optical and Structural Characterization of Arsenide/Phosphide Interfaces Formed by Flow Modulation Epitaxy Emerson, D. T., Smart, J. A., Whittingham, K. L., Chumbes, E. M., Shealy, J. R. MRS - Materials Research Society	8 Conference Proceedings Structural Characterization of Thick GaN Films Grown by Hydride Vapor Phase Epitaxy Romano, L. T., Molnar, R. J., Krusor, B. S., Anderson, G. A., Bour, D. P., Maki, P. MRS - Materials Research Society
3 Conference Proceedings Growth Transients During the Nucleation of GaInAs on InP by Organometallic Vapor-Phase Epitaxy Emerson, D. T., Shealy, J. R. MRS - Materials Research Society	9 Conference Proceedings Photonic local oscillator system for the Millimeter Array Payne,J.M., D'Addario,L.R., Emerson,D.T., Kerr,A.R., Shillue,B. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Structural and Optical Characterization of AlxGa1-xAs Grown at Low Temperatures by Organanometallic Vapor-Phose Epitaxy Wankerl, A., Emerson, D. T., Cook, M. J., Shealy, J. R. MRS - Materials Research Society	10 Conference Proceedings Selective Growth of GaP on Si by Metal Organic Vapor Phase Epitaxy Lee, J. S., Salzman, J., Emerson, D., Shealy, J. R., Ballantyne, J. M. MRS - Materials Research Society
5 Conference Proceedings SELECTIVE AREA OMVPE GROWTH OF GaInP ON PATTERNED GaAs SUBSTRATES USING SEMIMETALLIC AMORPHOUS CARBON MASK whittingham, Keith L., Pitts, Bobby L., Redinbo, Gregory F., Shealy, James R. MRS - Materials Research Society	11 Conference Proceedings * Experimental Benchmarking of Pu Electronic Structure Tobin, J. G., Moore, K. T., Chung, B. W., Wall, M. A., Schwartz, A. J., Ebbinghaus, B. B., Butterfield, M. T., Teslich … Materials Research Society
6 Conference Proceedings A Novel Approach for Integrated Passive Device Fabrication Sykora,Glenn, Pabich,R., O'Shea,J., Gleason,L., Sabo,C., Wood,J., Barnwell,P. SPIE - The International Society for Optical Engineering	12 Conference Proceedings Use of beam propagation modeling of Beamlet and Nova to ensure a "safe" National Ignition Facility laser system design Henesian,M.A., Renard,P.A., Auerbach,J.M., Caird,J.A., Ehrlich,R.B., Haney,S.J., Hunt,J.T., Lawson,J.K., Manes,K.R., … SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12