Blank Cover Image

Anhydrous HF Processing as an Alternative to HF/Water Processes

Author(s):
Publication title:
Environmental, safety, and health issues in IC production : symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
447
Pub. date:
1997
Page(from):
9
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993518 [1558993517]
Language:
English
Call no.:
M23500/447
Type:
Conference Proceedings

Similar Items:

Torek, K., Miechkowski, A., Ruzyllo, J.

Electrochemical Society

Brubaker, M., Staffa, J., Roman, P., Fakhouri, S., Ruzyllo, J.

Electrochemical Society

Torek, K., Ruzyllo, J., Kamieniecki, E.

Electrochemical Society

Daffron, C., Torek, K., Ruzyllo, J., Kamieniecki, E.

Electrochemical Society

Roman, P., Hwang, D., Torek, K., Ruzyllo, J., Kamieniecki, E.

MRS - Materials Research Society

Hanestad,R., Butterbaugh,J.W., Ben-Hamida,A., Gelmi,I.

SPIE-The International Society for Optical Engineering

Ruzyllo,J., Roman,P., Staffa,J., Kashkoush,I., Kamieniecki,E.

SPIE-The International Society for Optical Engineering

Chang, K., Shanmugasundaram, K., Lee, D.-O., Roman, P., Shallenberger, J., Chang, F.-M., Wang, J., Beck, R., Mumbauer, …

Electrochemical Society

Chang, K., Shallenberger, J., Chang, F.-M., Shanmugasundaram, K., Roman, P., Mumbauer, P., Ruzyllo, J.

Electrochemical Society

O. O. Awadelkarim, J. Jiang, S. A. Suliman, K. Saipatwari, L. J. Passmore, D. Lee, P. Roman, J. Ruzyllo

Electrochemical Society

Staffa, J., Fakhouri, S., Brubaker, M., Roman, P., Ruzyllo, J.

Electrochemical Society

Hwang, D.K., Ruzyllo, J., Kamieniecki, E.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12