Blank Cover Image

Interdiffusion and Phase Formation During Thermal Annealing of Ti/Mo Bilayers on Si Substrates

Author(s):
Mouroux, A.
Zhang, S.-L.
Kaplan, W.
Nygren, S.
Ostling, M.
Petersson, C. S.
1 more
Publication title:
Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
427
Pub. Year:
1996
Page(from):
511
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993303 [1558993304]
Language:
English
Call no.:
M23500/427
Type:
Conference Proceedings

Similar Items:

Mouroux, A., Palmans, R., Keinonen, J., Zhang, S.-L., Maex, K., Petersson, C. S.

MRS - Materials Research Society

I.C. Martins, G.Z. Soriano, M. Durazzo, E.F.U. de Carvalho, L.S. Montagna

Trans Tech Publications

Cardenes, J., Zhang, S-L., Svensson, B. G., Petersson, C. S.

MRS - Materials Research Society

Perepezko, J. H., Park, J. S., Landry, K., Sieber, H., Bassani, M. H. Silva da, Edelstein, A. S.

MRS - Materials Research Society

Roux, M., Mouroux, A., Zhang, S-L.

MRS - Materials Research Society

Maex, K., De Keersmaecker, R. F., Van Rossum, M., van der Weg, W. F.

Materials Research Society

Ma, Z., Allen, L. H., Lee, S.

Materials Research Society

Strane J., Li J., Russell W. S., Mayer W. J.

Kluwer Academic Publishers

Wei, C.S., Van der Spiegel, J., Setton, M., Santiago, J., Tanielian, M., Blackstone, S.

Materials Research Society

Zhang, S.-L, Ostling M,, Buchta, R., Smith, U., Linnros, J., Gong, S.-F.

Materials Research Society

Zhang, S.-L, Kaplan, W., Ostling M,, Norstrom, H., Lindberg, A.

Materials Research Society

Johnson, W. L.

MRS - Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12