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The Formation of TiN-Encapsulated Silver Films by Nitridation of Silver-Refractory Metal Alloys in NH3

Author(s):
Adams, Daniel
Alford, T. L.
Laursen, T.
Deng, F.
Morton, R.
Lau, S. S.
1 more
Publication title:
Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
427
Pub. Year:
1996
Page(from):
337
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993303 [1558993304]
Language:
English
Call no.:
M23500/427
Type:
Conference Proceedings

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