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Phase Formation in Cu(Sn) Alloy Thin Films

Author(s):
Clevenger, L. A.
Arcot, B.
Ziegler, W.
Colgan, E. G.
Hong, Q. Z.
d'Heurle, F. M.
Cabral, C., Jr.
Gallo, T. A.
Harper, J. M. E.
4 more
Publication title:
Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
427
Pub. Year:
1996
Page(from):
133
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993303 [1558993304]
Language:
English
Call no.:
M23500/427
Type:
Conference Proceedings

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