Closed-Loop Thickness Control of Resonant-Tunneling Diode MBE Growth Using Spectroscopic Ellipsometry
- Author(s):
Celii, F. G. Kao, Y-C. Moise, T. S. Woolsey, M. Harton, T. B. Haberman, K. - Publication title:
- Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 406
- Pub. Year:
- 1996
- Page(from):
- 365
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993099 [1558993096]
- Language:
- English
- Call no.:
- M23500/406
- Type:
- Conference Proceedings
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