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Light Scattering Measurement of Surface Topography During Formation of Titanium Silicide

Author(s):
Lavoie, C.
Cabral, C., Jr.
Clevenger, L. A.
Harper, J. M. E.
Jordan-Sweet, J.
Saenger, K. L.
Doany, F.
2 more
Publication title:
Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
406
Pub. Year:
1996
Page(from):
163
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993099 [1558993096]
Language:
English
Call no.:
M23500/406
Type:
Conference Proceedings

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