Blank Cover Image

Temperature Measurements Using Rotating Thermocouple in the MOCVD Rotating Disk Reactors

Author(s):
Publication title:
Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
406
Pub. Year:
1996
Page(from):
139
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993099 [1558993096]
Language:
English
Call no.:
M23500/406
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings PRODUCING AND CONTROLLING SUBSTRATE TEMPERATURE UNIFORMITY FROM 600｡？TO 1100｡？IN CVD ROTATING DISK REACTORS

Gurary, A. I., Tompa, G. S., Stall, R. A., Kroll, W. J., Zawadzki, P., Schumaker, N. E.

MRS - Materials Research Society
7 Conference Proceedings Real time substrate temperature control by emissivity compensated pyrometry during InxGa1-xAs1-y/InP growth on production scale rotating disc MOVPE reactors

Ramer, J., Patel, B., Patel, A., Boguslavskiy, V., Gurary, A.

MRS-Materials Research Society
2 Conference Proceedings New Level of Thermal Management in Vertical CVD Rotating Disk Reactor Technology

Gurary, A.I., Tompa, G.S., Thompson, A.G., Stall, R.A., Kroll, W.J., Schumaker, N.E.

Electrochemical Society
8 Conference Proceedings High Quality P-type GaN and InGaN Epitaxial Growth on C-Sapphire Substrates in a Production Scale Multi-Wafer Rotating Disc MOCVD Reactor

Yuan, C., Salagaj, T., Gurary, A., Thompson, A.G., Kroll, W., Stall, R.A., Schurman, M., Hwang, C.-Y, Li, Y., Mayo, …

Electrochemical Society
3 Conference Proceedings DEVELOPMENT AND IMPLEMENTATION OF LARGE AREA, ECONOMICAL ROTATING DISK REACTOR TECHNOLOGY FOR METALORGANIC CHEMICAL VAPOR DEPOSTION

Tompa, G. S., Zawadzki, P. A., McKee, M., Wolak, E., Moy, K., Stall, R. A., Gurary, A., Schumaker, N. E.

MRS - Materials Research Society
9 Conference Proceedings The Development of Resistive Heating for the High Temperature Growth of u-SiC using a Vertical CVD Reactor

Eshun, E., Taylor, C., Fama Diagne, N., Griffin, J., Spencer, M. G., Ferguson, I., Gurary, A., Stall, R.

Trans Tech Publications
4 Conference Proceedings Vertical high-speed rotating disk reactors for production scale MOVPE of compound semiconductors

R.C. Walker, A. Thompson, G.S. Tampa, P.A. Zawadzki, A. Gurary

Society of Photo-optical Instrumentation Engineers
10 Conference Proceedings Measurement of windage heating effects on high-speed rotating disks using ESPI

R.W.T. Preater, R.C. Swain

Society of Photo-optical Instrumentation Engineers
5 Conference Proceedings Viewport influence on optical pyrometry and deposition process in MOCVD vertical rotating disc reactors

Prokopenko, Anton, Gurary, Alexander, Boguslavskiy, Vadim, Ramer, Jeffrey, Schuman, Matthew

MRS-Materials Research Society
11 Conference Proceedings Growth and characterization of high-efficiency InGaN MQW blue and green LEDs from large-scale-production MOCVD reactors

Tran,C.A., Karlicek,R.F.,Jr., Brown,M.G., Eliashevich,I., Gurary,A., Stall,R.A.

SPIE - The International Society for Optical Engineering
6 Conference Proceedings MOCVD Production of III-V Nitride Materials in a Multi-Wafer Rotating Disk Reactor

Liu, H., Thompson, A.G., Chern, C.S., Zawadzki, P.A., Kroll, W.J., Stall, R.A., Hwang, C-Y., Mayo, W.E.

Electrochemical Society
12 Conference Proceedings MECHANICAL THERMAL AND FLOW DYNAMICS ISSUES IN COMPOUND SEMICONDUCTOR MOCVD REACTOR DESIGN

Gurary, A. I., Tompa, G. S., Moy, K., Zawadzki, P.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12