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Energetic Ion Beams in Semiconductor Processing: Summary of a DOE Panel Study

Author(s):
Picraux, S. T.
Chason, E.
Poate, J. M.
Borland, J. O.
Current, M. I.
Rubia, T. Diaz de la
Eaglesham, D. J.
Holland, O. W.
Law, M. E.
Magee, C. W.
Mayer, J. W.
Melngailis, J.
Tasch, A. F.
8 more
Publication title:
Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
396
Pub. Year:
1996
Page(from):
859
Pub. info.:
Pittsburgh: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992993 [1558992995]
Language:
English
Call no.:
M23500/396
Type:
Conference Proceedings

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