MeV Ion Induced Damages and their Annealing Behavior in Silicon

MeV Ion Induced Damages and their Annealing Behavior in Silicon

Author(s):

Publication title:

Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

396

Pub. Year:

1996

Page(from):

781

Pub. info.:

Pittsburgh: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992993 [1558992995]

Language:

English

Call no.:

M23500/396

Type:

Conference Proceedings

Details

TDL ID:	ZA00017051
Series ID:	PA00000011
Conf. info. (Name):	Symposium on ion-solid interactions for materials modification and processing
Conf. info. (Number):	1995
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1995.11.27-1995.12.01

Similar Items:

1 Conference Proceedings Time of Flight of Drifting Electrons and Holes in Stabilized a-Se Film Lee, Dong-Gil, Park, Ji-Koon, Choi, Jang-Yong, Kim, Jae-Hyung, Nam, Sang-Hee Materials Research Society	7 Conference Proceedings THE ELECTRICAL PROPERTIES OF POLYOXIDE DEPENDING ON THE POLYCRYSTALLINE-Si FORMATION CONDITIONS Yi, Kyoung-Soo, Cho, Deok-Ho, Lee, Jeong Yong, Nam, Kee-Soo, Kang, Sang-Won, Lee, Jin-Hyo Materials Research Society
2 Conference Proceedings The Role of AlN Interlayer in AlxGa1-xN/GaN Heterostructures With High x From 0.35 to 0.50 Grown on Sapphire (0001) Seo, In-Seok, Lee, Seung-Jae, Jang, Seong-Hwan, Yeon, Jeong-Mo, Leem, Jae-Young, Park, Yong-Jo, Lee, Cheul-Ro Materials Research Society	8 Conference Proceedings Attrition and CO₂ adsorption of dry sorbents in fluidized bed Ki Chul Cho, Eun Yong Lee, Jeong Suk Yoo, Young Hean Choung, Sang Woo Park, Kwang Joong Oh Elsevier
3 Conference Proceedings Measurement of Pressure Drop in a Liquid Metal Reactor Fuel Assembly Seok Ki Choi, II Kon Cho, Kil Yong Lee, Ho Yun Nam, Jong-Hyeun Choi, Hoon Ki Choi American Society of Mechanical Engineers	9 Conference Proceedings (582v) Electrospun Clay: Fabrication of Moldable 3-Dimensional Fibrous Scaffolds Slgirim Lee, Sung Hwan Cho, Unyong Jeong, Jae-Hyung Jang American Institute of Chemical Engineers
4 Conference Proceedings Short Channel Poly-Si TFT with Single Grain Boundary by Excimer Laser Annealing on Al-Masked a-Si Layer Jung, Sang-Hoon, Lee, Jae-Hoon, Han, Min-Koo Materials Research Society	10 Conference Proceedings THE ROLE OF UNPRECRACKED HYDRIDE SPECIES ADSORBED ON THE GaAs(100) IN THE GROWTH OF GaAs BY ULTRAHIGH VACUUM CHEMICAL VAPOR DEPOSITION USING TRIMETHYLGALLIUM … Park, Seong-Ju, Ro, Jeong-Rae, Sim, Jae-Ki, Ha, Jeong Sook, Lee, El-Hang MRS - Materials Research Society
5 Conference Proceedings An Evaluation of Fuel Rod Fretting Wear in Spacer Grid With Conformal Shape Young Ki Jang, Nam Kyu Park, Jae Ik Kim, Kyu Tae Kim, Chong Chul Lee, Kyu Zong Cho American Society of Mechanical Engineers	11 Conference Proceedings Observation and Annealing of Incomplete Recrystallized Junction Defects Due to the Excimer Laser Beam Diffraction at the Gate Edge in Poly-Si TFT Nam, Woo-Jin, Park, Kee-Chan, Jung, Sang-Hoon, Park, Soo-Jeong, Han, Min-Koo Materials Research Society
6 Conference Proceedings Improvement of Characteristics in Highly Reliable Thin Film Diode With Anodic Tantalum Pentoxide by Low Temperature Annealing Conditions Lee, Chan-Jae, Hong, Sung-Jei, Park, Sung-Kyu, Kim, Yong-Hoon, Kwak, Min-Gi, Kim, Won-Keun, Han, Jeong-In Materials Research Society	12 Conference Proceedings THE REACTION OF OZONE AND H2O2 IN AMMONIUM HYDROXIDE (NH4OH) SOLUTIONS AND THEIR REACTION WITH SILICON WAFERS Eom, Dae-Hong, Kim, Sang-Yong, Lee, Kang-Kuk, Kim, Ki-Sub, Song, Hyung-Soo, Park, Jin-Goo Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12