Growth of Tin Oxide Film Deposited by a Hybrid Ion Beam

Growth of Tin Oxide Film Deposited by a Hybrid Ion Beam

Author(s):

Choi, W. K.

Publication title:

Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

396

Pub. Year:

1996

Page(from):

611

Pub. info.:

Pittsburgh: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992993 [1558992995]

Language:

English

Call no.:

M23500/396

Type:

Conference Proceedings

Details

TDL ID:	ZA00017051
Series ID:	PA00000011
Conf. info. (Name):	Symposium on ion-solid interactions for materials modification and processing
Conf. info. (Number):	1995
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1995.11.27-1995.12.01

Similar Items:

1 Conference Proceedings Preparation and Characterization of Tin Oxide Films by Ion-Assisted Deposition Choi, W-K., Cho, J-S., Song, S. K., Kim, Y. T., Yoon, K. H., Jung, H-J., Koh, S-K. MRS - Materials Research Society	7 Conference Proceedings Surface Modification of Polymer by Ion-Assisted Reaction in Reactive Gases Environment Koh, S-K., Choi, S. C., Choi, W-K., Jung, H-J., Hur, H. H. MRS - Materials Research Society
2 Conference Proceedings Crystalline Structure and Composition of Tin Oxide Film Grown by Reactive Ion Assisted Deposition as a Function of Average Irradiating Energy Choi, W. K., Song, S. K., Cho, J. S., Jung, H. -J., Koh, S. K. MRS - Materials Research Society	8 Conference Proceedings Enhancement of Adhesion Between Cu Thin Film and Polyimide Modified by Ion Assisted Reaction Choi, S. C., Kim, K. H., Jung, H-J., Whang, C. N., Koh, S. K. MRS - Materials Research Society
3 Conference Proceedings Thermal Stability of Cu Films on TiN/Ti/Si(100) by Partially Ionized Beam Deposition Jang, H. G., Kim, K. H., Choi, D. J., Han, S., Choi, S. C., Choi, W-K., Jung, H-J., Koh, S-K. MRS - Materials Research Society	9 Conference Proceedings XPS AND FTIR STUDY OF THE THIN POLYIMIDE FILMS FABRICATED BY IONIZED CLUSTER BEAM DEPOSITION Kim, K. W., Chae, K. H., Choi, S. C., Cho, S. J., Vahe, Y. W., Whang, C. N., Jung, H. J., Lee, D. H., Lee, J. K. Materials Research Society
4 Conference Proceedings Thermal Stability of Cu Films on TiN/Ti/Si(100) by Partially Ionized Beam Deposition Jang, H. G., Kim, K. H., Choi, D. J., Han, S., Choi, S. C., Choi, W. K., Jung, H-J., Koh, S. K. MRS - Materials Research Society	10 Conference Proceedings Electrical Resistivity of Copper Films by Partially Ionized Beam Deposition Han, S., Yoon, K. H., Kim, K. H., Jang, H. G., Choi, S. C., Jung, H-J., Koh, S-K. MRS - Materials Research Society
5 Conference Proceedings Effect of Ion Energy on Structural and Chemical Properties of Tin Oxide Film in Reactive Ion-Assisted Deposition (R-IAD) Cho, Jun-Sik, Choi, Won-Kook, Yoon, Ki Hyun, Cho, J., Yoon, Young-Soo, Jung, Hyung-Jin, Koh, Seok-Keun MRS - Materials Research Society	11 Conference Proceedings Electrical Resistivity of Copper Films by Partially Ionized Beam Deposition Han, S., Yoon, K. H., Kim, K. H., Jang, H. G., Choi, S. C., Jung, H-J., Koh, S. K. MRS - Materials Research Society
6 Conference Proceedings Characteristics of ethylene polymerization catalyzed over ziegler-natta/metallocene hybrid catalysts: Comparison between silica-based and magnesium-based … Cho, H. S., Choi, D. J., Song, I. K., Lee, W. Y. Elsevier	12 Conference Proceedings Characterization of modified surface of indium tin oxide film during process of laser patterning Zeng,J.N., Koh,H.L., Ren,Z.M., Song,W.D., Lu,Y.F. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12