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Characterization of Defects Created in Silicon Due to Etching in Low-Pressure Plasmas Containing Fluorine and Oxygen

Author(s):
Buyanova, I. A.
Henry, A.
Monemar, B.
Lindstrom, J. L.
Lamprecht, A.
Svensson, B. G.
Oehrlein, G. S.
2 more
Publication title:
Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
396
Pub. Year:
1996
Page(from):
599
Pub. info.:
Pittsburgh: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992993 [1558992995]
Language:
English
Call no.:
M23500/396
Type:
Conference Proceedings

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