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Carbon Nitride Formation by Plasma Assisted Ion Beam Deposition

Author(s):
Tompa, G. S.
Murzin, I. H.
Kim, S. I.
Ahn, Y. O.
Gallois, B.
Fischer, T. E.
Forsythe, E. W.
2 more
Publication title:
Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
396
Pub. Year:
1996
Page(from):
545
Pub. info.:
Pittsburgh: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992993 [1558992995]
Language:
English
Call no.:
M23500/396
Type:
Conference Proceedings

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