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Materials Science Issues of Plasma Source Ion Implantation

Author(s):
Nastasi, M.
Elmoursi, A. A.
Faehl, R. J.
Hamdi, A. H.
Henins, I.
Malaczynski, G. W.
Mantese, J. V.
Munson, C.
Qui, X.
Reass, W. A.
Rej, D. J.
Scheuer, J. T.
Speck, C. E.
Walter, K. C.
Wood, B. P.
10 more
Publication title:
Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
396
Pub. Year:
1996
Page(from):
455
Pub. info.:
Pittsburgh: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992993 [1558992995]
Language:
English
Call no.:
M23500/396
Type:
Conference Proceedings

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